Using the generated vue.config.js from vue-cli v4 (generating a vue 3 project) It provided me this file:
// vue.config.js
const { defineConfig } = require('@vue/cli-service')
module.exports = defineConfig({
  transpileDependencies: true,
})
I then modified it to this:
// vue.config.js
const { defineConfig } = require('@vue/cli-service')
module.exports = defineConfig({
  transpileDependencies: true,
  configureWebpack: {
    devtool: 'source-map',
  }
})
Which works enough for me to enable VSCode debugging in Chrome/Electron.
*Edit
The error you are getting may be unrelated to source-maps and related to warnings from vue itself.
For example
runtime-core.esm-bundler.js:6584
[Vue warn]: Failed to resolve component: AMadeUpComponentName
If this is a native custom element, make sure to exclude it from component resolution via compilerOptions.isCustomElement. 
  at <MyView onVnodeUnmounted=fn<onVnodeUnmounted> ref=Ref< null > > 
  at <RouterView> 
  at <App>
Unfortunately this is a limitation of vue.  However, improvements have been made between VueJS v2 and v3.  Finally, I couldn't find an original source, but I read that improving the warning messages to track down the cause of warnings and errors is a high priority feature.
* Edit 10/12/2022
I had an older project that this answer didn't solve at all.  After a yarn upgrade and @vue/cli upgrading, this configuration began working again!